Observation and analysis of epitaxial growth of CoSi2 on (100) Si.
| Autor: | Bulle-Lieuwma, C. W. T., van Ommen, A. H., Hornstra, J., Aussems, C. N. A. M. |
|---|---|
| Předmět: | |
| Zdroj: | Journal of Applied Physics; 3/1/1992, Vol. 71 Issue 5, p2211, 14p, 17 Diagrams, 1 Chart, 2 Graphs |
| Abstrakt: | Deals with a study which investigated the microstructure of cobalt-silicide layers on (100) silicon by transmission electron microscopy. Background to the study; Experimental details; Results and discussion. |
| Databáze: | Complementary Index |
| Externí odkaz: |
|