Noise measurements in thin-film interconnections: A nondestructive technique to characterize electromigration.
| Autor: | Bagnoli, P. E., Diligenti, A., Neri, B., Ciucci, S. |
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| Zdroj: | Journal of Applied Physics; 3/1/1988, Vol. 63 Issue 5, p1448, 4p, 1 Black and White Photograph, 1 Diagram, 5 Graphs |
| Abstrakt: | Presents a study which conducted noise measurements to examine the electromigration in aluminum thin film interteconnections. Description of the measuring apparatus; Methodology; Results. |
| Databáze: | Complementary Index |
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