Dependence of electrical properties on film thickness in Pb(ZrxTi1-x)O3 thin films produced by metalorganic chemical vapor deposition.

Autor: Sakashita, Yukio, Segawa, Hideo, Tominaga, Kouji, Okada, Masaru
Předmět:
Zdroj: Journal of Applied Physics; 6/1/1993, Vol. 73 Issue 11, p7857, 7p, 2 Black and White Photographs, 1 Diagram, 1 Chart, 7 Graphs
Abstrakt: Presents a study which described the relationship between film thickness and the electrical properties of metalorganic chemical vapor deposition-deposited Pb(Zr[subx]Ti[sub1-x])O[sub3] (PZT) thin films. Applications of PZT; Microstructure of PZT; Experimental details; Results and discussion; Conclusions.
Databáze: Complementary Index