Temporal behavior of modulated optical reflectance in silicon.

Autor: Opsal, Jon, Taylor, Michael W., Smith, W. Lee, Rosencwaig, Allan
Předmět:
Zdroj: Journal of Applied Physics; 1/1/1987, Vol. 61 Issue 1, p240, 9p, 1 Diagram, 3 Charts, 7 Graphs
Abstrakt: Presents a study of the temporal behavior of the laser-induced modulated optical reflectance from the surfaces of crystalline silicon wafers and epitaxial silicon films. Experimental conditions for the laser-induced modulated reflectance measurements; Theory of laser-induced modulated reflectance in silicon; Temporal behavior of silicon wafers.
Databáze: Complementary Index