Autor: |
Opsal, Jon, Taylor, Michael W., Smith, W. Lee, Rosencwaig, Allan |
Předmět: |
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Zdroj: |
Journal of Applied Physics; 1/1/1987, Vol. 61 Issue 1, p240, 9p, 1 Diagram, 3 Charts, 7 Graphs |
Abstrakt: |
Presents a study of the temporal behavior of the laser-induced modulated optical reflectance from the surfaces of crystalline silicon wafers and epitaxial silicon films. Experimental conditions for the laser-induced modulated reflectance measurements; Theory of laser-induced modulated reflectance in silicon; Temporal behavior of silicon wafers. |
Databáze: |
Complementary Index |
Externí odkaz: |
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