| Autor: |
Jasinski, J. M., Meyerson, B. S., Nguyen, T. N. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 1/1/1987, Vol. 61 Issue 1, p431, 3p |
| Abstrakt: |
Examines the deposition of silicon nitride thin films using excimer laser photolysis of ammonia/silane or ammonia/disilane mixtures. Description of three photochemical deposition techniques considered in the analysis; Electrical characteristics of lamp deposited films; Details of the deposition apparatus used in the study. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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