Defect structure and intermixing of ion-implanted AlxGa1-xAs/GaAs superlattices.

Autor: Ralston, J., Wicks, G. W., Eastman, L. F., De Cooman, B. C., Carter, C. B.
Předmět:
Zdroj: Journal of Applied Physics; 1/1/1986, Vol. 59 Issue 1, p120, 4p, 2 Charts, 4 Graphs
Abstrakt: Presents a study which examined the defect structure and intermixing of annealed ion-implanted aluminum[sub0.3]gallium[sub0.3] arsenide/gallium arsenide superlattices. Use of cross-sectional transmission electron microsopy and Raman spectroscopy in the analysis; Results and discussion.
Databáze: Complementary Index