The effect of processing conditions on the GaAs/plasma-grown insulator interface.

Autor: Hshieh, F. I., Borrego, J. M., Ghandhi, S. K.
Předmět:
Zdroj: Journal of Applied Physics; 1/1/1986, Vol. 59 Issue 1, p1, 4p, 1 Chart, 3 Graphs
Abstrakt: Presents a study which evaluated the effect of processing conditions on the interface state density from capacitance-voltage measurements on metal oxide semiconductor capacitors, particularly on gallium arsenide field effect transistors. Examination of the optimum annealing condition; Experiment; Results and discussion.
Databáze: Complementary Index