Formation of epitaxial β-FeSi2 films on Si(001) as studied by medium-energy ion scattering.

Autor: Konuma, K., Vrijmoeth, J., Zagwijn, P. M., Frenken, J. W. M., Vlieg, E., van der Veen, J. F.
Předmět:
Zdroj: Journal of Applied Physics; 2/1/1993, Vol. 73 Issue 3, p1104, 6p
Abstrakt: Focuses on a study which studied the lattice structure, composition, and morphology of ultrathin epitaxial films of beta-iron silicide grown on silicon through annealing. Description of lattices in the system; Experimental procedures; Results.
Databáze: Complementary Index