Piezoresistive graphite/polyimide thin films for micromachining applications.

Autor: Frazier, A. Bruno, Allen, Mark G.
Předmět:
Zdroj: Journal of Applied Physics; 5/1/1993, Vol. 73 Issue 9, p4428, 6p, 3 Diagrams, 1 Chart, 8 Graphs
Abstrakt: Offers information on a study that described the preparation of graphite/polyimide thin film composites for microsensor system applications. Theoretical background; Methodology; Results and discussion.
Databáze: Complementary Index