A two-temperature model of the inductively coupled rf plasma.

Autor: Mostaghimi, Javad, Proulx, Pierre, Boulos, Maher I.
Předmět:
Zdroj: Journal of Applied Physics; 3/1/1987, Vol. 61 Issue 5, p1753, 8p
Abstrakt: Presents information on a study which proposed a two-temperature model for the computation of the two-dimensional flow and temperature fields in a rf inductively coupled plasma torch. Discussion on the mechanism that leads to the difference between the electron and the heavy particle temperature; Assumptions made for the present model; Governing equations and boundary conditions.
Databáze: Complementary Index