The origin of a highly resistive layer at a growth-interrupted interface of GaAs grown by molecular-beam epitaxy.

Autor: Iimura, Y., Shiraishi, T., Takasugi, H., Kawabe, M.
Předmět:
Zdroj: Journal of Applied Physics; 3/1/1987, Vol. 61 Issue 5, p2095, 3p
Abstrakt: Presents information on a study which analyzed the origin of the formation of a highly resistive layer around a growth-interrupted interface in gallium arsenide. Problems in the fabrication of electronic devices by molecular beam epitaxy; Measurement of the capacitance-voltage carrier profile; Clarification of the existence of deep-trap levels at the growth-interrupted interface.
Databáze: Complementary Index