Hydrogenated amorphous silicon films prepared in cascaded glow discharge reactors.

Autor: Panwar, O. S., Dixit, P. N., Bhattacharyya, R., Shah, V. V.
Předmět:
Zdroj: Journal of Applied Physics; 3/1/1986, Vol. 59 Issue 5, p1578, 9p
Abstrakt: Reports on the findings of various investigations involving transmission and scanning electron microscopy. Schematic of cascaded glow discharge reactors; Instrument used to record the spectral dependence of optical reflection and transmission; Methods used to carry out an estimation of density of gap states in films grown in a cascaded reactor.
Databáze: Complementary Index