| Autor: |
D’Anna, E., Leggieri, G., Luches, A., Martino, M., Drigo, A. V., Mihailescu, I. N., Ganatsios, S. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 2/1/1991, Vol. 69 Issue 3, p1687, 10p, 5 Black and White Photographs, 10 Graphs |
| Abstrakt: |
Presents a study that examined the synthesis titanium nitride layers by multipulse excimer laser irradiation in a nitrogen or ammonia atmosphere. Characteristics of the titanium nitride layers; Determination of the microhardness of the titanium nitride layers; Examination of the electron micrographs of the titanium nitride layers. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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