Ion channeling studies of epitaxial Fe and Co silicides on Si.

Autor: Schwarz, C., Onda, N., Goncalves-Conto, S., Sirringhaus, H., von Känel, H., Pixley, R. E.
Předmět:
Zdroj: Journal of Applied Physics; 12/1/1994, Vol. 76 Issue 11, p7256, 9p, 1 Diagram, 2 Charts, 7 Graphs
Abstrakt: Presents ion channeling studies of epitaxial iron and cobalt silicides on silicon. Description of the strain measurements performed; Factor to which the epitaxial stabilization of the cesium chloride phases is attributed; Technique used to determine the crystalline quality of thick bcc iron and silicide films.
Databáze: Complementary Index