| Autor: |
McMaster, Mark C., Hsu, Wen L., Coltrin, Michael E., Dandy, David S. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 12/1/1994, Vol. 76 Issue 11, p7567, 11p, 3 Charts, 9 Graphs |
| Abstrakt: |
Presents a study that measured the gas composition near a growing diamond surface in a hot-filament-assisted chemical-vapor-deposition reactor. Dependencies of the gas composition; Impact of increasing the surface temperature on the hydrocarbon composition; Factor to which the temperature dependencies of film properties are attributed. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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