Enhanced oxygen precipitation in electron irradiated silicon.

Autor: Hallberg, Tomas, Lindström, J. Lennart
Předmět:
Zdroj: Journal of Applied Physics; 12/1/1992, Vol. 72 Issue 11, p5130, 9p, 3 Charts, 9 Graphs
Abstrakt: Presents a study that investigated the precipitation of oxygen for 2 megaelectronvolt electron irradiated silicon samples with irradiation doses. Presence of different concentrations of the vacancy-dioxygen center created at the irradiation in the samples; Irradiation dose dependence of the incubation time and oxygen decay rate for the precipitation process; Explanation for the enhanced precipitation among vacancy-dioxygen samples.
Databáze: Complementary Index