Comparative study of self-limiting growth of GaAs using different Ga-alkyl compounds: (CH3)3Ga, C2H5(CH3)2Ga, and (C2H5)3Ga.

Autor: Sakuma, Y., Ozeki, M., Ohtsuka, N., Kodama, K.
Předmět:
Zdroj: Journal of Applied Physics; 12/1/1990, Vol. 68 Issue 11, p5660, 5p, 2 Diagrams, 1 Chart, 3 Graphs
Abstrakt: Presents a comparative study on self-limiting growth of gallium arsenide (GaAs) using different gallium-alkyl compounds. Growth technique used to prepare semiconductor materials with atomically controlled thickness and abrupt heterointerfaces; Details of experimental techniques used; Investigation of the dynamics of the chemical state of the trimethylgallium-exposed GaAs surface.
Databáze: Complementary Index