| Autor: |
Krchnavek, Robert R., Lalk, Gail R., Hartman, Davis H. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 12/1/1989, Vol. 66 Issue 11, p5156, 5p, 2 Black and White Photographs, 1 Diagram, 4 Graphs |
| Abstrakt: |
Presents a study which used a focused argon-ion laser beam to fabricate optical channel waveguides on oxidized silicon wafers using a commercially available spin-on polymers. Materials and methods used; Physical dimensions of the thickness and width as a function of the laser spot dwell time; Measurement of the waveguide loss. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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