Optical properties of polymide during ArF excimer laser ablation.

Autor: Hahn, D. W., Pettit, G. H., Ediger, M. N.
Předmět:
Zdroj: Journal of Applied Physics; 8/1/1994, Vol. 76 Issue 3, p1830, 3p
Abstrakt: Deals with a study which observed the reflectivity measurements of polymide during argon fluoride excimer laser ablation using a unique posterior surface technique. Information on the possible mechanisms behind changes in the optical properties of organic materials; Examination of the reflectivity from thin polymer films; Evaluation of the characteristic changes occurring within the solid material.
Databáze: Complementary Index