Low-temperature epitaxial growth of BaTiO3 films by radio-frequency-mode electron cyclotron resonance sputtering.
| Autor: | Matsuoka, Morito, Hoshino, Koichi, Ono, Ken’ichi |
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| Zdroj: | Journal of Applied Physics; 8/1/1994, Vol. 76 Issue 3, p1768, 8p |
| Abstrakt: | Presents information on a study which examined the low temperature epitaxial growth of thin films by radio-frequency-mode electron cyclotron resonance sputtering. Background of the study; Methodology of the study; Results and discussion. |
| Databáze: | Complementary Index |
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