An IR, optical, and electron-spin-resonance study of as-deposited and annealed a-Ge1-xCx[ATOTHER]@B:[/ATOTHER]H prepared by rf sputtering in Ar/H2/C3H8.

Autor:	Shinar, J., Wu, H. S., Shinar, R., Shanks, H. R.
Předmět:	GERMANIUM compounds SPUTTERING (Physics) THIN films AUGER effect
Zdroj:	Journal of Applied Physics; 8/1/1987, Vol. 62 Issue 3, p808, 5p
Abstrakt:	Prepares the hydrogenated amorphous germanium carbide films by radio frequency (rf) sputtering at various rf power levels and mixtures of argon, hydrogen[sub2], and propane. Measurement of film thickness; Auger spectra of several samples; Concentration of hydrogen bonded to carbon.
Databáze:	Complementary Index
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