Zinc diffusion in InP using diethylzinc and phosphine.

Autor: Wisser, J., Glade, M., Schmidt, H. J., Heime, K.
Předmět:
Zdroj: Journal of Applied Physics; 4/1/1992, Vol. 71 Issue 7, p3234, 4p, 6 Graphs
Abstrakt: Presents information on a study that investigated the effect of the diethylzinc and phosphine partial pressures and of the diffusion temperature and time on the hole and zinc concentration profiles. Introduction to diffusion of zinc and InP and GaAs; Experimental procedure; Results and discussion on the study.
Databáze: Complementary Index