Surface segregation mechanism during two-dimensional epitaxial growth: The case of dopants in Si and GaAs molecular-beam epitaxy.

Autor: Andrieu, S., d’Avitaya, F. Arnaud, Pfister, J. C.
Předmět:
Zdroj: Journal of Applied Physics; 4/1/1989, Vol. 65 Issue 7, p2681, 7p, 2 Diagrams, 1 Chart, 2 Graphs
Abstrakt: Presents a study that explained dopant surface segregation during two-dimensional growth in silicon and gallium arsenide molecular beam epitaxy. Analysis of the dopant behavior; Estimation of the incorporation coefficient; Equations and predictions associated with dopant surface segregation.
Databáze: Complementary Index