The thin-film reaction between Ti and thermally grown SiO2.
| Autor: | Barbour, J. C., Fischer, A. E. M. J., van der Veen, J. F. |
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| Zdroj: | Journal of Applied Physics; 9/15/1987, Vol. 62 Issue 6, p2582, 3p |
| Abstrakt: | Provides information on a study which examined the reaction between a thin titanium film and a thermally grown silicon oxide substrate using medium-energy ion scattering. Methods; Results; Discussion. |
| Databáze: | Complementary Index |
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