In situ scanning electron microscopy observation of the dynamic behavior of electromigration voids in passivated aluminum lines.
| Autor: | Besser, Paul R., Madden, Michael C., Flinn, Paul A. |
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| Zdroj: | Journal of Applied Physics; 10/15/1992, Vol. 72 Issue 8, p3792, 6p |
| Abstrakt: | Presents a study which examined the dynamic behavior of electromigration voids using a field-emission scanning electron microscope fitted with a Robinson backscatter detector. Formation, growth and motion of electromigration voids; Comparison of experimental results with void motion models. |
| Databáze: | Complementary Index |
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