Rapid thermal annealing of high concentration mixed As/In- and P/In-implanted silicon single crystals.
| Autor: | Shiryaev, S. Yu., Nylandsted Larsen, A., Safronov, N. |
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| Zdroj: | Journal of Applied Physics; 10/15/1990, Vol. 68 Issue 8, p3953, 4p, 4 Graphs |
| Abstrakt: | Presents a study which examined the effect of group-V donor impurities on the behavior of indium atoms impanted into silicon single crystals. Experimental design; Results and discussion; Conclusion. |
| Databáze: | Complementary Index |
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