Microstructural control of diamond thin films by microlithographic patterning.

Autor:	DeNatale, J. F., Flintoff, J. F., Harker, A. B.
Předmět:	MICROLITHOGRAPHY DIAMONDS NUCLEATION METAL crystal growth METALLIC films
Zdroj:	Journal of Applied Physics; 10/15/1990, Vol. 68 Issue 8, p4014, 6p, 11 Black and White Photographs
Abstrakt:	Presents a study which utilized microlithographic patterning to elucidate the mechanisms controlling diamond film nucleation and grain growth. Experimental details; Results and discussion; Conclusion.
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu