Application of porous silicon formation selectivity to impurity profiling in p-type silicon substrates.

Autor: Ligeon, M., Muller, F., Herino, R., Gaspard, F., Halimaoui, A., Bomchil, G.
Předmět:
Zdroj: Journal of Applied Physics; 10/15/1989, Vol. 66 Issue 8, p3814, 6p, 9 Graphs
Abstrakt: Presents a study that proposed a type of application of porous silicon formation. Discussion on the anodization of uniformly p-doped silicon semiconductors; Information on impurity profiling in p-type silicon semiconductors; Characterization of the selectivity of porous silicon formation on p-type silicon.
Databáze: Complementary Index