| Autor: |
Sullivan, Brian T., Parsons, R. R., Westra, K. L., Brett, M. J. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 10/15/1988, Vol. 64 Issue 8, p4144, 6p |
| Abstrakt: |
Presents information on a study which measured the optical properties of reactively sputtered indium nitride (InN) thin films in the spectral region using spectroscopic ellipsometry. Construction of the direct current planar magnetron sputtering system; Microstructural analysis carried out to determine if film microstructure could be used to interpret the ellipsometry data; Results of x-ray diffraction studies of the InN films. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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