| Autor: |
Kwan, Alex Man Ho, Song, Sichao, Lu, Xing, Lu, Lei, Teh, Ying-Khai, Teh, Ying-Fei, Chong, Eddie Wing Cheung, Gao, Yan, Hau, William, Zeng, Fan, Wong, Man, Huang, Chunmei, Taniyama, Akira, Makino, Yoshihide, Nishino, So, Tsuchiya, Toshiyuki, Tabata, Osamu |
| Předmět: |
|
| Zdroj: |
Journal of Microelectromechanical Systems; Jun2012, Vol. 21 Issue 3, p586-595, 10p |
| Abstrakt: |
Reported presently are two design approaches to improve the performance of an electrothermal in-plane microactuator with “chevron” beams. One incorporates beams with uniform cross sections but nonuniform lengths or tilt angles to accommodate the thermally induced expansion of the “shuttle”; the other incorporates beams with nonuniform cross sections to widen the high-temperature “expansion” zones. It is derived analytically, verified using finite-element simulations, and tested by microfabricating actuators occupying a constrained device area that the incorporation of one or the other proposed features leads to an improved performance figure-of-merit, defined to be the product of the actuation displacement and force. An increase in the figure-of-merit by up to 65% per beam has been measured. \hfill [2011-0186] [ABSTRACT FROM PUBLISHER] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
|
