Determination of interfacial roughness correlation in W/C multilayer films: Comparison using soft and hard x-ray diffraction.

Autor: Savage, D. E., Phang, Y.-H., Rownd, J. J., MacKay, J. F., Lagally, M. G.
Předmět:
Zdroj: Journal of Applied Physics; 11/15/1993, Vol. 74 Issue 10, p6158, 7p, 1 Diagram, 9 Graphs
Abstrakt: Presents a study which examined the interfacial roughness in W/C multilayer films with x-ray diffraction. Characteristics of multilayer thin films; Materials and methods; Comparison of measurements of interfacial roughness at different wavelengths; Description of the rocking scans through the third-order Bragg peaks of samples.
Databáze: Complementary Index