Autor: |
Savage, D. E., Phang, Y.-H., Rownd, J. J., MacKay, J. F., Lagally, M. G. |
Předmět: |
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Zdroj: |
Journal of Applied Physics; 11/15/1993, Vol. 74 Issue 10, p6158, 7p, 1 Diagram, 9 Graphs |
Abstrakt: |
Presents a study which examined the interfacial roughness in W/C multilayer films with x-ray diffraction. Characteristics of multilayer thin films; Materials and methods; Comparison of measurements of interfacial roughness at different wavelengths; Description of the rocking scans through the third-order Bragg peaks of samples. |
Databáze: |
Complementary Index |
Externí odkaz: |
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