X-ray reflectivity of an Sb delta-doping layer in silicon.

Autor: Slijkerman, W. F. J., Gay, J. M., Zagwijn, P. M., van der Veen, J. F., Macdonald, J. E., Williams, A. A., Gravesteijn, D. J., van de Walle, G. F. A.
Předmět:
Zdroj: Journal of Applied Physics; 11/15/1990, Vol. 68 Issue 10, p5105, 4p
Abstrakt: Focuses on a study which presented x-ray reflectivity measurements on silicon (001) crystals containing a delta-doping layer of antimony atoms a few nanometers below the surface. Information on the doping profile of antimony; Characteristic decay length of antimony.
Databáze: Complementary Index