Modulated reflectance study of strain in epitaxial GaAs on silicon.

Autor: Kallergi, M., Aubel, J., Sundaram, S.
Předmět:
Zdroj: Journal of Applied Physics; 11/15/1989, Vol. 66 Issue 10, p4862, 4p
Abstrakt: Deals with a study which examined the nature of the strain in epitaxial layers of gallium arsenide grown by laser-assisted metalorganic chemical vapor deposition on silicon substrate, using the electrolyte electroreflectance technique. Information on heteroepitaxy of gallium arsenide films; Methodology of the study; Results and discussion.
Databáze: Complementary Index