Anisotropic etching versus interaction of atomic steps: Scanning tunneling microscopy observations on HF/NH4F-treated Si(111).

Autor: Pietsch, G. J., Köhler, U., Henzler, M.
Předmět:
Zdroj: Journal of Applied Physics; 5/15/1993, Vol. 73 Issue 10, p4797, 11p
Abstrakt: Presents information on a study which discussed results obtained with scanning tunneling microscopy on silicon after treatment with various hydrofluoric acid (HF) solutions. Spectroscopical methods used to investigate the chemical state of the surface after HF treatment; Description of the ultrahigh-vacuum system; Investigation of oxide removal versus preferential attack of silicon; Dependence of the surface morphology on the initial atomic step structure induced by an intentional sample.
Databáze: Complementary Index