FeAlN/SiO2 and FeAlN/Al2O3 multilayers for thin-film recording heads (invited).

Autor:	Kryder, M. H., Wang, S., Rook, K.
Předmět:	SEMICONDUCTOR films SILICON CORROSION resistant materials
Zdroj:	Journal of Applied Physics; 5/15/1993, Vol. 73 Issue 10, p6212, 6p, 1 Black and White Photograph, 9 Graphs
Abstrakt:	Discusses the corrosion test results of FeAlN films. Analysis of the magnetic properties of films deposited on silicon and aluminum TiC substrates; Properties of FeAlN single layers; Permeance spectra; Corrosion resistance of FeN and FeAlN films.
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu