| Autor: |
Boeuf, J. P., Belenguer, Ph. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 5/15/1992, Vol. 71 Issue 10, p4751, 4p |
| Abstrakt: |
Presents information on a study which utilized self-consistent fluid and particle-in-cell (PIC) models of radio frequency glow discharges to analyze the existence of different regimes experimentally observed in silane discharges. Development of a PIC-Monte Carlo model; Comparison between the experimental and calculated current-voltage phase shift; Conclusions drawn for attachment on vibrational-excited states of silane or hydrogen. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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