The effect of Ar+ ion implantation on the electrical characteristics of Cr/P-Si Schottky diodes.

Autor: Malherbe, J. B., de Witt, B., Berning, G. L. P.
Předmět:
Zdroj: Journal of Applied Physics; 3/15/1992, Vol. 71 Issue 6, p2757, 3p, 1 Chart, 2 Graphs
Abstrakt: Examines the effect of argon[sup+] ion implantation on the electrical characteristics of chromium/p-type silicon Schottky diodes. Significance of high-energy ion implantation of metal-silicon systems; Characteristics for some typical diodes before and after implantation at the indicated dose densities; Schottky parameters at different ion dose densities.
Databáze: Complementary Index