Investigation of amorphization and crystallization processes in ion-implanted garnet by transmission electron microscopy.

Autor: Yoshiie, T., Bauer, C. L., Kryder, M. H.
Předmět:
Zdroj: Journal of Applied Physics; 3/15/1985, Vol. 57 Issue 6, p2155, 6p
Abstrakt: Presents an investigation of the amorphization and crystallization processes in ion-implanted garnet by transmission electron microscopy. Functionality of ion-implanted garnets; Stages of the amorphization process; Discussion on amorphization by ion implantation and crystallization by annealing.
Databáze: Complementary Index