Compositional variations in Ti-W films sputtered over topographical features.
| Autor: | Liu, D., Dew, S. K., Brett, M. J., Smy, T., Tsai, W. |
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| Zdroj: | Journal of Applied Physics; 6/15/1994, Vol. 75 Issue 12, p8114, 7p |
| Abstrakt: | Examines compositional variations in titanium (Ti)-tungsten (W) films sputtered over topographical features. Sticking coefficients of Ti and W; Difference in the transport properties of the materials; Implication of the agreement between simulation and experimental results. |
| Databáze: | Complementary Index |
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