| Autor: |
Sakashita, Yukio, Ono, Toshiyuki, Segawa, Hideo, Tominaga, Kouji, Okada, Masaru |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 6/15/1991, Vol. 69 Issue 12, p8352, 6p, 4 Black and White Photographs, 2 Diagrams, 7 Graphs |
| Abstrakt: |
Describes the relationship between the composition and electrical properties of lead zirconate-titanate Pb(Zr[subx]Ti[sub1-x]O[sub3] (PZT) thin films with tetragonal structure prepared by metalorganic chemical vapor deposition method. Deposition characteristics of PZT thin films; Microstructure of PZT thin films; Electrical properties of PZT films. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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