| Autor: |
Langford, A. A., Fleet, M. L., Nelson, A. J., Asher, S. E., Goral, J. P., Mason, A. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 6/15/1989, Vol. 65 Issue 12, p5154, 7p, 8 Graphs |
| Abstrakt: |
Presents a study which determined the fluorine content in a silicon:hydrogen:fluorine with 0%-10% fluorine by electron probe microanalysis, x-ray photoelectron spectroscopy, secondary ion mass spectrometry and infrared spectrometry. Methods; Results; Discussion. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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