| Autor: |
Kuper, F. G., De Hosson, J. Th. M., Verwey, J. F. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 6/15/1987, Vol. 61 Issue 12, p5475, 3p, 5 Black and White Photographs, 1 Diagram |
| Abstrakt: |
Proposes a structure with which electron-beam-induced current (EBIC) images of grains and boundaries in as-grown silicon-on-insulator layers can be obtained. Ways to minimize the detrimental effects of grain boundaries on thin films; Disadvantage of stripheating; Main advantage of the proposed structure. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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