| Autor: |
Scheller, Geoffrey R., Gottscho, Richard A., Graves, D. B., Intrator, T. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 7/15/1988, Vol. 64 Issue 2, p598, 9p, 1 Diagram, 2 Charts, 3 Graphs |
| Abstrakt: |
Presents a study which measured quenching rates for argon metastable states in radio-frequency discharges though mixtures of argon and the molecular gases SF[sub6], chlorine[sub2], BCl[sub3], nitrogen[sub3]. Discussion on the development of models for radio-frequency glow-discharge chemistry; Description of the reactor design; Control of gas flow rate; Measurements of temperature of argon metastable. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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