Optical properties of dense thin-film Si and Ge prepared by ion-beam sputtering.

Autor: Collins, R. W., Windischmann, H., Cavese, J. M., Gonzalez-Hernandez, J.
Předmět:
Zdroj: Journal of Applied Physics; 7/15/1985, Vol. 58 Issue 2, p954, 4p, 2 Charts, 10 Graphs
Abstrakt: Examines the optical properties of ion-beam-sputtered silicon and germanium using spectroscopic ellipsometry. Discrepancies between the structure of the p-silicon deduced from Raman and ellipsometry spectra; Significance of thin-film polycrystalline silicon; Psuedodielectric functions for ion-beam-deposited silicon prepared at different substrate temperatures.
Databáze: Complementary Index