Formation of ultrathin tungsten filaments via selective low-pressure chemical vapor deposition.

Autor: Busta, H. H., Feinerman, A. D., Ketterson, J. B., Wong, G. K.
Předmět:
Zdroj: Journal of Applied Physics; 7/15/1985, Vol. 58 Issue 2, p987, 3p, 3 Black and White Photographs, 1 Diagram, 2 Graphs
Abstrakt: Reports on the formation of ultrathin tungsten filaments via selective low-pressure chemical vapor deposition. Physical effects of the formation of thin wires; Procedure for tungsten filament formation; Scanning electron micrograph of a short section of the tungsten filament.
Databáze: Complementary Index