Influence of Fermi-level pinning on barrier height inhomogeneity in PtSi/p-Si Schottky contacts.

Autor: Tanabe, A., Konuma, K., Teranishi, N., Tohyama, S., Masubuchi, K.
Předmět:
Zdroj: Journal of Applied Physics; 1/15/1991, Vol. 69 Issue 2, p850, 4p, 2 Black and White Photographs, 6 Graphs
Abstrakt: Examines the barrier height inhomogeneity in platinum silicide (PtSi)/p- type silicon (Si) contacts by internal photoemission. Influence of Fermi-level pinning on barrier height inhomogeneity in PtSi/p-type Si Schottky contacts; Interface structures in PtSi/Si contacts; Examination of the origins of Region II formation in both PtSi/Si and iridium silicide/Si contacts.
Databáze: Complementary Index