Nucleation and deposition of W on GaAs by excimer laser-assisted chemical vapor deposition.
| Autor: | van Maaren, A. J. P., Sinke, W. C., Flicstein, J. |
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| Zdroj: | Journal of Applied Physics; 2/15/1993, Vol. 73 Issue 4, p1981, 8p, 2 Black and White Photographs, 1 Chart, 8 Graphs |
| Abstrakt: | Reports on the deposition mechanism involved in photochemical vapor deposition of tungsten (W) of gallium arsenide. Examination of the temperature dependence of the deposition rate; Properties of W; Details of the procedure of the deposition experiments. |
| Databáze: | Complementary Index |
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