| Autor: |
Kubinski, D. J., Hoffman, D. W., Soltis, R. E., Logothetis, E. M. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 2/15/1992, Vol. 71 Issue 4, p1860, 8p |
| Abstrakt: |
Focuses on a study which investigated the effect of dilute additions of ozone in molecular oxygen on the limiting reactive gas pressures required for in situ deposition of yttrium-barium-copper-oxygen thin films. Materials and methods; Results of thermodynamic analysis; Function of molecular oxygen in reactive deposition. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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