| Autor: |
Vahedi, V., Lieberman, M. A., Alves, M. V., Verboncoeur, J. P., Birdsall, C. K. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 2/15/1991, Vol. 69 Issue 4, p2008, 7p, 8 Graphs |
| Abstrakt: |
Focuses on a general one-dimensional model to study the plasma-immersion ion implantation process in different coordinate systems. Analytic expressions for normal ion velocity distribution and other parameters; Effect of a charge-exchange collision on an ion; Equation concerning the average ion velocity at the target. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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